Nano Imprinting Machine
2023. 8. 11. 15:52ㆍProducts/Machines
UV curing Nano Imprinting Machine[ANT-4]
| Curing Type | UV (Ultra-Violet) |
| Stamp | Quartz, Si, PFPE, PDMS, PC |
| Imprinting Conditions | Wafer: 1~4” Room Temperature Imprinting Pressure ≤ 2bar Single Layer / Single Step |
| Imprinting Head | Chip-size Multi-Head Imprinting Unit Multiple Fixturing/Air Chucking |
| XYZ Stage | Stroke : 250 x 120 x 25 mm Z Sliding Unit |
| UV System | 40mW/cm²(2kw) |
| Anti Vibration System | Cut-off: 1~1.5Hz |
| Controller | UMAC-2 |
Thermal Curing Nano Imprinting Machine[ANT-6H]
| Curing Type | UV, Thermal, UV+Thermal |
| Stamp | Quartz, Si, Ni, PDMS, PMMA, PC, PUA, etc |
| Imprinting Conditions | Wafer: 1”~6” Imprinting Pressure ≤2bar(UV), ≤60bar(TH) Single Layer / Single Step |
| Imprinting Head | Chip-size Multi-Head Imprinting Unit |
| XZ Stage/Unit | X: LM 450mm Z: Sliding Unit 150mm |
| UV System | ＞ 50mW/cm² |
| Temperature | RT~250℃ |
| Heating/Cooling V. | Heating : 20℃/m, Cooling : 15℃/m |
| Vacuum | ＞ 10-2 Torr |
| Anti Vibration Unit | Cut-off: 1~1.5Hz |
| Controller | PLC (Touch Screen) |
| Dimension/Weight | 860W x 700D x 1900H / 1Ton |
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